Laboratory for preparation and characterization of nanostructures

Laboratory is focused on preparation of new structures by litographic methods like optical and electron beam litography, preparation and characterization of thin films of progressive materials that could also act as the precursors in preparation process of nanostructures. It also includes an Atomic Force Microscope both for research of surface physical properties (topography on nanometer scale) and for preparation of the nanostructures (local anodic oxidation). The laboratory is localized in semi-clean room.

Research scientists: Vladimír Komanický, Tomáš Samuely




Sputtering system
Sputtering system
Scanning electron microscope
Atomic force microscope
Atomic force microscope
Atomic force microscope

Optical litography
Plasma etching system
Spin coater
Wire bonder
Ultra-pure water system
Furnace
Ventilation system